Through-Silicon Vias for 3D Integration
This book focuses on foundry-based process technology that enables the fabrication of 3-D ICs. The core of the book discusses the technology platform for pre-packaging wafer lever 3-D ICs. However, this book does not include a detailed discussion of 3-D ICs design and 3-D packaging. This is an edited book based on chapters contributed by various experts in the field of wafer-level 3-D ICs process technology. They are from academia, research labs and industry.
Country | USA |
Brand | Springer |
Manufacturer | Springer |
Binding | Hardcover |
ItemPartNumber | 23129494 |
UnitCount | 1 |
EANs | 9780387765327 |
ReleaseDate | 0000-00-00 |