The main focus of this book is ULSI front-end technology. It covers from the early history of semiconductor science & technology from 1874 to state-of-the-art FINFET technology in 2016. Some ULSI back-end technology is also covered, for example, the science and technology of MIM capacitors for analog CMOS has been included in this book.
Country | USA |
Brand | World Scientific Publishing Company |
Manufacturer | World Scientific Pub Co Inc |
Binding | Hardcover |
UnitCount | 1 |
EANs | 9789813222151 |
ReleaseDate | 0000-00-00 |