Fundamentals of Microfabrication: The Science of

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Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition
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MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world.

A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field.

Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem.

New in the Second Edition
Revised chapters that reflect the many recent advances in the field
Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology
In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs.
Many more links to the Web
Problem sets in each chapter
Country USA
Brand CRC Press
Manufacturer CRC Press
Binding Hardcover
UnitCount 1
EANs 9780849308260
ReleaseDate 0000-00-00

Country	USA
Brand	CRC Press
Manufacturer	CRC Press
Binding	Hardcover
UnitCount	1
EANs	9780849308260
ReleaseDate	0000-00-00

Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition

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